Pulse duration measuring apparatus
AssigneeDisco Corporation
InventorsKoji TOYAMA, Nobuyuki KIMURA, Koichi KATAYAMA, Keiji NOMARU
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AssigneeDisco Corporation
InventorsKoji TOYAMA, Nobuyuki KIMURA, Koichi KATAYAMA, Keiji NOMARU
Estimating the term…
A pulse duration measuring apparatus includes a polarizing beam splitter for splitting a pulsed laser beam into a first laser beam and a second laser beam, a first mirror for reflecting the first laser beam traveling toward the polarizing beam splitter, a second mirror for reflecting the second laser beam traveling toward the polarizing beam splitter, a first quarter wavelength plate disposed between the polarizing beam splitter and the first mirror, a second quarter wavelength plate disposed between the polarizing beam splitter and the second mirror, an optical path length changing unit for moving the first mirror or the second mirror to change the length of the respective optical paths, a nonlinear crystal body for allowing a combined laser beam to pass therethrough, and a photodetector for measuring an optical intensity of the combined laser beam that has passed through the nonlinear crystal body.
A pulse duration measuring apparatus having a plurality of optical parts for measuring pulse duration of a pulsed laser beam, comprising:
Dependencies are inferred from the claim text.