US 2023/0053953 A1 · GROUP III NITRIDE STRUCTURES AND MANUFACTURING METHODS THEREOF

Abstract

A group-III-nitride structure and a manufacturing method thereof are provided. In the manufacturing method, one or more grooves are formed by etching a first group-III-nitride epitaxial layer with a patterned first mask layer as a mask; then a second mask layer is formed at least on one or more bottom walls of the one or more grooves, and a first epitaxial growth is performed on the first group-III-nitride epitaxial layer to laterally grow and form a second group-III-nitride epitaxial layer with the second mask layer as a mask, where the one or more grooves are filled with the second group III-nitride epitaxial layer; a second epitaxial growth is then performed on the second group-III-nitride epitaxial layer to grow and form a third group-III-nitride epitaxial layer on the second group-III-nitride epitaxial layer and the patterned first mask layer.

Claims24

Dependent claims

A method of manufacturing a group-III-nitride structure, comprising:

providing a first group-III-nitride epitaxial layer;
forming a patterned first mask layer on the first group-III-nitride epitaxial layer;
and etching the first group-III-nitride epitaxial layer to form one or more grooves with the patterned first mask layer as a mask;
forming a second mask layer at least on one or more bottom walls of the one or more grooves;
and laterally growing and forming a second group-III-nitride epitaxial layer by performing a first epitaxial growth on the first group-III-nitride epitaxial layer with the second mask layer as a mask, where the one or more grooves are filled with the second group-III-nitride epitaxial layer;
and
growing and forming a third group-III-nitride epitaxial layer on the second group-III-nitride epitaxial layer and the patterned first mask layer by performing a second epitaxial growth on the second group-III-nitride epitaxial layer.

4 more elements

Dependencies are inferred from the claim text.

Group iii nitride structures and manufacturing methods thereof

Life of this patent

Group iii nitride structures and manufacturing methods thereof

Life of this patent

Abstract

Claims24