Method and apparatus of controlling semiconductor manufacturing device, storage medium and semiconductor manufacturing device

A semiconductor manufacturing device, comprising:

• a device portion;
• an air intake pipe, the air intake pipe being disposed in the device portion;
• an air jet pipe, the air jet pipe being disposed in the device portion, the air intake pipe and the air jet pipe being configured to be connected and form a first airflow path;
• a negative pressure generating device, the negative pressure generating device being detachably connected to the device portion;
• an air pumping pipe, an air pumping terminal of the air pumping pipe being connected to the negative pressure generating device, and when the first airflow path is cut off, the negative pressure generating device is connected to an air outlet terminal of the air intake pipe through the air pumping pipe, such that the air pumping pipe and the air intake pipe are connected and form a second airflow path;
• and
• a device control portion, the device control portion being electrically connected to the negative pressure generating device.

A non-transitory computer-readable storage medium, when an instruction in the non-transitory computer-readable storage medium is executed by a processor of an apparatus of controlling a semiconductor manufacturing device, the apparatus of controlling a semiconductor manufacturing device is caused to perform:

• receiving a control instruction, the control instruction being used for instructing to disconnect an air outlet terminal of an air intake pipe from an air inlet terminal of an air jet pipe, to cut off a first airflow path, or connect the air outlet terminal of the air intake pipe to the air inlet terminal of the air jet pipe, to turn on the first airflow path;
• and
• driving a negative pressure generating device to be turned on and connected to the air outlet terminal of the air intake pipe or driving the negative pressure generating device to be turned off and disconnected from the air outlet terminal of the air intake pipe based on the control instruction;
• wherein the negative pressure generating device comprises an air pumping pipe, and when the first airflow path is cut off, the negative pressure generating device is turned on and connected to the air outlet terminal of the air intake pipe, such that the air pumping pipe and the air intake pipe are connected and form a second airflow path.