Resonator and resonance device
AssigneeMurata Manufacturing Co., Ltd.
InventorsYoshiyuki HIGUCHI, Ryota KAWAI, Yoshihisa INOUE, Masakazu FUKUMITSU
Life of this patent
Estimating the term…
Loading patent…
AssigneeMurata Manufacturing Co., Ltd.
InventorsYoshiyuki HIGUCHI, Ryota KAWAI, Yoshihisa INOUE, Masakazu FUKUMITSU
Estimating the term…
A vibration member is provided that includes a base with front and rear ends opposite to each other, and vibration arms fixed to the front end, extending away therefrom, and including at least one first vibration arm and a pair of second vibration arms positioned on both sides of a first vibration arm group including the at least one first vibration arm in a direction intersecting a longitudinal direction. A holding arm is provided that has one end connected to the base and the other end connected to a frame. A plurality of vibration portions include a piezoelectric film, and a lower electrode and an upper electrode that sandwich the piezoelectric film. A connection wiring line that connects the respective upper electrodes of the pair of second vibration arms to each other is provided in a region of at least either of the base or the holding arm.
A resonator, comprising:
A resonator, comprising:
Dependencies are inferred from the claim text.