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US 2022/0372650 A1Published application
Raw material supply unit, single-crystal silicon ingot growing apparatus comprising same and raw material supply method
AssigneeSK Siltron Co., Ltd.
InventorsYun Gwang SHIN, Young Jung LEE
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Abstract
Provided is a raw material supply unit comprising: a body having a space filled with a raw material; a partition for dividing the body, in the longitudinal direction, into at least two areas; at least two valves each provided in the respective areas in the body divided by the partition so as to open/close the lower portion of the body; and a drive unit for raising, in the vertical direction, each of the valves independently of each other.
Claims13
A raw material supply unit comprising:
- a body having a space configured to be filled with a raw material;
- a partition configured to divide the body into at least two regions in a longitudinal direction;
- at least two valves provided in the regions of the body divided by the partition, the at least two valves being configured to open and close a lower part of the body;
- and
- a driving unit configured to independently move the respective valves in an upward-downward direction.
2 more elements
A raw material supply method comprising:
- filling a crucible with polysilicon and melting the polysilicon;
- disposing a raw material supply unit having polysilicon injected thereinto above the crucible filled with silicon melt;
- supplying the polysilicon to the crucible through a first region of a lower surface of the raw material supply unit;
- melting the polysilicon supplied to the crucible while rotating the crucible;
- and
- supplying the polysilicon to the crucible through a second region of the lower surface of the raw material supply unit.
3 more elements
Dependencies are inferred from the claim text.