Film formation device, film formation method, and article manufacturing method

An article manufacturing method for manufacturing an article from a substrate, comprising:

• a process of forming a film of a composition on the substrate by irradiating the composition on the substrate with light;
• a process of forming a distribution of an integrated light amount of the light on the substrate,
• wherein the distribution of the integrated light amount is determined on the basis of residual film ratio characteristics of the composition and at least one of a curved shape of an imaging plane of an original plate used in a subsequent process and a surface shape of a base film formed on the substrate;
• a process of disposing a photoresist film on the film;
• a process of patterning the photoresist film by exposure and development processes to form a photoresist pattern;
• and
• a process of processing the substrate using the photoresist pattern.