Teaching method for transfer device, and transfer system

A transfer system, comprising:

• a transfer device including a pick configured to hold a substrate and a mapping sensor;
• an alignment device;
• and
• a controller,
• wherein the controller is configured to:
• control the transfer device to detect a position of an edge of the substrate arranged in a teaching target module by the mapping sensor;
• set a teaching position in one horizontal direction based on the detected position of the edge of the substrate;
• control the transfer device to transfer the substrate from the teaching target module to a stage of the alignment device by the pick based on the set teaching position;
• control the alignment device to rotate the stage by a predetermined angle and detect a locus of the position of the edge of the substrate;
• and
• estimate an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate.