Aluminum nitride dopant scheme for bulk acoustic wave filters
AssigneeSkyworks Solutions, Inc.
InventorMichael David Hill
Life of this patent
Estimating the term…
Abstract
Disclosed is an acoustic wave resonator comprising a substrate material formed of aluminum nitride (AlN) doped with one or more of beryllium (Be), strontium (Sr), and sodium (Na) to enhance performance of the acoustic wave resonator.
Claims17
An acoustic wave resonator comprising a piezoelectric material formed of aluminum nitride (AlN) doped with one or more of beryllium (Be), strontium (Sr), and sodium (Na) to enhance performance of the acoustic wave resonator.
A method of forming an acoustic wave resonator comprising depositing electrodes on a piezoelectric film formed of aluminum nitride (AlN) doped with one or more of beryllium (Be), strontium (Sr), and sodium (Na).
A piezoelectric material comprising aluminum nitride (AlN) doped with one or more of beryllium (Be), strontium (Sr), and sodium (Na).
Dependencies are inferred from the claim text.