Control system and control method
AssigneeRohm Co., Ltd.
InventorTakashi NAIKI
Life of this patent
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Abstract
A control system includes: a piezoelectric element having a deformation amount that varies according to a magnitude of a drive voltage applied to the piezoelectric element; a base on which the piezoelectric element is arranged; a deformation sensor configured to detect a displacement of the base caused by deformation of the piezoelectric element and output the displacement as a displacement signal; and a drive device configured to apply the drive voltage to the piezoelectric element while adjusting the magnitude of the drive voltage so as to reduce a difference between a value of the displacement signal and a value of a setting signal.
Claims12
A control system for controlling a mechanical displacement of a base according to a setting signal from a signal source, the control system comprising:
- a piezoelectric element having a deformation amount that varies according to a magnitude of a drive voltage applied to the piezoelectric element;
- the base on which the piezoelectric element is arranged;
- a deformation sensor configured to detect the displacement of the base caused by deformation of the piezoelectric element and output the displacement as a displacement signal;
- and
- a drive device configured to apply the drive voltage to the piezoelectric element while adjusting the magnitude of the drive voltage so as to reduce a difference between a value of the displacement signal and a value of the setting signal.
A control method of controlling a mechanical displacement of a base according to a setting signal from a signal source, the control method comprising:
- detecting the displacement of the base caused by deformation of a piezoelectric element, the piezoelectric element being arranged on the base and having a deformation amount that varies according to a magnitude of a drive voltage applied to the piezoelectric element;
- outputting the detected displacement as a displacement signal;
- and
- applying the drive voltage to the piezoelectric element while adjusting the magnitude of the drive voltage so as to reduce a difference between a value of the displacement signal and a value of the setting signal.
Dependencies are inferred from the claim text.