Buried Zener Design
AssigneeNXP B.V.
InventorsSaumitra Raj Mehrotra, Kejun Xia
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Abstract
A method for manufacturing a Zener diode includes implanting an N-type Buried Layer (NBL) with an N-type dopant in a first epitaxial layer, wherein the NBL comprises an NBL opening excluding the N-type dopant. A P-type Buried Layer (PBL) having a peak PBL doping concentration below the NBL is implanted. A second epitaxial layer is grown over the NBL. A P-type region (Plink) is implanted to couple to the PBL above the NBL opening, and to couple the Plink to an Anode electrode. An N-type region (Nlink) is implanted to couple the NBL to a Cathode electrode.
Claims20
A method for manufacturing a Zener diode comprising:
- implanting an N-type Buried Layer (NBL) in a first epitaxial layer;
- implanting a P-type Buried Layer (PBL) having a peak PBL doping concentration below the NBL;
- laterally diffusing the PBL;
- growing a second epitaxial layer over the NBL;
- implanting a P-type region (Plink) for coupling the PBL to an Anode electrode;
- and
- implanting an N-type region (Nlink) for coupling the NBL to a Cathode electrode.
A Zener diode comprising:
- an N-type Buried Layer (NBL) in a first epitaxial layer;
- a P-type Buried Layer (PBL) having a peak PBL doping concentration below the NBL;
- a second epitaxial layer over the NBL;
- a P-type region (Plink) coupled to the PBL and to an Anode electrode;
- and
- an N-type region (Nlink) coupled to the NBL and to a Cathode electrode.
A method for manufacturing a Zener diode comprising:
- implanting an N-type Buried Layer (NBL) with an N-type dopant in a first epitaxial layer, wherein the NBL comprises an NBL opening excluding the N-type dopant;
- implanting a P-type Buried Layer (PBL) having a peak PBL doping concentration below the NBL;
- growing a second epitaxial layer over the NBL;
- implanting a P-type region (Plink) to couple to the PBL above the NBL opening, and to couple the Plink to an Anode electrode;
- and
- implanting an N-type region (Nlink) to couple the NBL to a Cathode electrode.
Dependencies are inferred from the claim text.