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US 2022/0285482 A1Published application
Trench capacitor device for superconducting electronic circuit and superconducting qubit device
AssigneeImec Vzw
InventorAnton Potocnik
Life of this patent
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Abstract
The disclosure relates to a trench capacitor device for a superconducting electronic circuit. The trench capacitor device includes a substrate, a first capacitor electrode, and a second capacitor electrode, each electrode including a superconductor and extending into the substrate. The first electrode is circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode.
Claims20
A trench capacitor device comprising:
- a substrate;
- a first electrode comprising a superconductor and extending into the substrate;
- and
- a second electrode comprising a superconductor and extending into the substrate, the first electrode being circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode.
1 more element
A superconducting qubit device comprising:
- a trench capacitor device comprising:
- a substrate;
- a first electrode comprising a superconductor and extending into the substrate;
- and
- a second electrode comprising a superconductor and extending into the substrate, the first electrode being circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode;
- and
- a Josephson junction connected between the first electrode and the second electrode of the trench capacitor device.
4 more elements
A method comprising:
- forming in a substrate of crystalline silicon a first trench and a second trench, such that first trench is circumferentially enclosed by the second trench;
- and
- depositing a superconductor to form a first electrode in the first trench and a second electrode in the second trench, the first electrode being circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode.
Dependencies are inferred from the claim text.