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US 2022/0285235 A1Published application
Semiconductor testkey pattern and test method thereof
AssigneeUnited Semiconductor (Xiamen) Co., Ltd.
InventorsLINSHAN YUAN, Guang Yang, JINJIAN OUYANG, JIAWEI LYU, Chin-Chun Huang, WEN YI TAN
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Abstract
The invention provides a semiconductor testkey pattern, the semiconductor testkey pattern includes a high density device region and a plurality of resistor pairs surrounding the high density device region, wherein each resistor pair includes two mutually symmetrical resistor patterns.
Claims15
A semiconductor testkey pattern, comprising:
- a high density device region;
- and
- a plurality of resistor pairs surrounding the high density device region, wherein each resistor pair comprises two mutually symmetrical resistor patterns.
A method for testing semiconductor testkey patterns, comprising:
- providing a semiconductor testkey pattern, the semiconductor testkey pattern comprising:
- a high density device region;
- a plurality of resistor pairs surrounding the high density device region, wherein each resistor pair comprises two mutually symmetrical resistor patterns;
- and
- performing a laser heating step on the semiconductor testkey pattern;
- and
- testing the resistance change of each resistor pair of the semiconductor testkey pattern.
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Dependencies are inferred from the claim text.