Semiconductor element characteristic value estimation method and semiconductor element characteristic value estimation system

A semiconductor element characteristic value estimation method comprising:

• a first step of inputting a first step list included in a first lot and a characteristic value of a first semiconductor element manufactured in accordance with the first step list;
• a second step of collecting a second step list whose degree of similarity to the first step list is higher than or equal to a certain level from a group of step lists;
• a third step of performing a test using the characteristic value of the first semiconductor element and a characteristic value of a second semiconductor element manufactured in accordance with the second step list;
• a fourth step of performing, among a first plurality of semiconductor elements manufactured in accordance with a first plurality of step lists included in the first lot, analysis of variance on characteristic values of the first plurality of semiconductor elements and comparison of the first plurality of step lists and recording whether a step which is different among the first plurality of step lists influences the characteristic values of the first plurality of semiconductor elements;
• a fifth step of collecting a third step list whose degree of similarity to each of the first plurality of step lists is higher than or equal to a certain level from the group of step lists;
• a sixth step of performing regression analysis of parameters for a step influencing the characteristic values of the first plurality of semiconductor elements and a characteristic value of a third semiconductor element manufactured in accordance with the third step list;
• and
• a seventh step of estimating, from a second plurality of step lists included in a second lot, characteristic values of a second plurality of semiconductor elements manufactured in accordance with the second plurality of step lists before the second plurality of semiconductor elements are manufactured.