Substrate transfer device and substrate processing system

A substrate processing system comprising:

• a plurality of chambers;
• a transfer chamber connecting the plurality of chambers;
• and
• the substrate transfer device provided with a planar motor provided in the transfer chamber and including an array of coils;
• a transfer unit configured to move above the planar motor;
• and a controller configured to control supply of a current to the array of the coils, wherein the transfer unit includes:
• a first base including an array of first magnets and configured to move above the planar motor;
• a second base including an array of second magnets and configured to move above the planar motor, the second base being arranged coaxially with the first base;
• and at least one arm configured to be extended/contracted by rotating the second base relative to the first base.