Vacuum processing apparatus and vacuum processing method using the same

A vacuum processing method of a vacuum processing apparatus including a plurality of transport chambers arranged in order along a first direction;

• a plurality of process chambers connected to the transport chambers along a second direction that is perpendicular to the first direction;
• a first position conversion chamber and a second position conversion chamber connected to the first transport chamber among the transport chambers;
• a carrier transport chamber connected to the position conversion chamber;
• and a first load lock chamber connected to the first position conversion chamber and a second load lock chamber connected to the second position conversion chamber, the method comprising:
• transporting the carrier from the carrier transport chamber to the first position conversion chamber in a first position state in which a surface of the carrier faces the first direction or the second direction;
• changing a position of the carrier such that the carrier is changed from the first position state to a second position state in which the surface faces a plane formed by the first direction and the second direction in the first position conversion chamber;
• carrying the substrate into the first load lock chamber in the second position state;
• transporting the carried substrate to the first position conversion chamber in the second position state;
• mounting the substrate on the carrier in the first position conversion chamber;
• changing the substrate and the carrier from the second position state to the first position state in the first position conversion chamber;
• rotating rotational movement stages of the transport chambers about a rotation axis that is perpendicular to the first direction and the second direction;
• and
• moving the rotational movement stages of the transport chambers along a plane formed by the first direction and the second direction.