Semiconductor manufacturing apparatus and semiconductor manufacturing method

Abstract

A semiconductor manufacturing apparatus according to an embodiment includes a first chamber, a second chamber, and a fluid pressure applier. The first chamber includes a first film and a first container. The first film is deformable. The first container contains an incompressible fluid that causes the first film to be deformed. The second chamber includes a second film and a second container. The second film faces the first film. The second film is deformable. The second container contains the incompressible fluid that causes the second film to be deformed. The fluid pressure applier is configured to apply a pressure to the incompressible fluid of each of the first chamber and the second chamber to cause the first film and the second film to be deformed in bonding a plurality of substrates to each other between the first film and the second film.

Dependencies are inferred from the claim text.