Composition for removing photoresist
AssigneesMitsubishi Gas Chemical Company, Inc., Mitsubishi Gas Chemical Trading, Inc.
InventorsYukihide NAITO, Kensuke OHMAE, Hiroshi MATSUNAGA, Satoshi TAMAI
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AssigneesMitsubishi Gas Chemical Company, Inc., Mitsubishi Gas Chemical Trading, Inc.
InventorsYukihide NAITO, Kensuke OHMAE, Hiroshi MATSUNAGA, Satoshi TAMAI
Estimating the term…
The present invention provides: an aqueous composition capable of removing a photoresist from a printed wiring board or a semiconductor wafer while preventing corrosion of tin plating and tin alloy plating in addition to a copper wiring; and a method for removing a photoresist using the aqueous composition. The aqueous composition according to the present invention is characterized by comprising an alkanolamine (A), a quaternary ammonium hydroxide (B), a sugar alcohol (C), a polar organic solvent (D), and water (E), wherein, with respect to the total amount of the composition, the content of the alkanolamine (A) is 2.5-50 mass %, the content of the quaternary ammonium hydroxide (B) is 0.5-4 mass %, and the content of the sugar alcohol (C) is 0.5-20 mass %.
A composition for removing a photoresist after forming a circuit pattern, wherein the photoresist is for forming the circuit pattern on an insulation layer at least partially having a copper wiring, wherein the circuit pattern constitutes a connecting terminal portion of the copper wiring and comprises copper and at least one selected from the group consisting of tin and a tin alloy, wherein:
Dependencies are inferred from the claim text.