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US 2022/0285138 A1Published application
Substrate support
AssigneeTokyo Electron Limited
InventorsShin YAMAGUCHI, Yasuharu SASAKI, Koei ITO
Life of this patent
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Abstract
A substrate support includes a base, a substrate support layer disposed on the base, the substrate support layer being formed of an insulating material, and an electrostatic internal electrode layer disposed in the substrate support layer, the electrostatic internal electrode layer including a body portion and a plurality of protruding portions, the body portion having a circular shape in a plan view, and the plurality of protruding portions radially protruding from the body portion.
Claims18
A substrate support comprising:
- a base;
- a substrate support layer disposed on the base, the substrate support layer being formed of an insulating material;
- and
- an electrostatic internal electrode layer disposed in the substrate support layer, the electrostatic internal electrode layer including a body portion and a plurality of protruding portions, the body portion having a circular shape in a plan view, and the plurality of protruding portions radially protruding from the body portion.
1 more element
Dependencies are inferred from the claim text.