Edge ring systems for substrate processing systems

A substrate support for a substrate processing system comprising:

• a baseplate;
• a vertical bore defined in the baseplate and including an upper opening and a lower opening;
• an outer guide sleeve including a first flanged portion and a first cylindrical portion extending from the first flanged portion and defining a first inner bore,
• wherein the first cylindrical portion of the outer guide sleeve is inserted in the upper opening of the vertical bore with the first flanged portion arranged adjacent to the upper opening of the vertical bore;
• and
• an inner guide sleeve including a second flanged portion and a second cylindrical portion extending from the second flanged portion and defining a second inner bore configured to receive a lift pin,
• wherein the inner guide sleeve is inserted into a bottom opening of the vertical bore and the first inner bore of the outer guide sleeve with the second flanged portion arranged adjacent to the lower opening of the vertical bore.