Systems and Methods for Inspection of IC Devices

A system for inspecting ICs, the system comprising:

• one or more controllers;
• one or more computer readable storage media;
• and
• program instructions stored on the one or more computer readable storage media for execution by at least one of the one or more controllers, the stored program instructions including instructions to:
• receive one or more images of a Device Under Test (DUT) from one or more imaging devices;
• detect observed features in the one or more images and producing a first synthetic representation of a part design of the DUT that includes the observed features;
• infer a presence of one or more first unobserved features, wherein the one or more first unobserved features are inferred using a mapping and inference model (MIM);
• and
• add the one or more first unobserved features to the first synthetic representation of the part design of the DUT.

An apparatus for inspecting ICs, comprising:

• one or more imaging devices configured to capture one or more images of a Device Under Test (DUT);
• and
• a controller comprising a mapping and inference model (MIM) that is configured to cause the controller to:
• receive one or more images of the DUT from the one or more imaging devices;
• detect observed features in the one or more images of the DUT and produce a first synthetic representation of a part design of the DUT, the first synthetic representation including at least the observed features;
• infer a presence of one or more first unobserved features based at least in part on the first synthetic representation;
• and
• generate a second synthetic representation of the part design of the DUT by adding one or more second unobserved features to the first synthetic representation of the part design.