Resonator and resonance device including the same
AssigneeMurata Manufacturing Co., Ltd.
InventorsKeisuke TAKEYAMA, Toshio NISHIMURA
Life of this patent
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Abstract
A resonator is provided that includes a vibrator with two portions that vibrate in phases opposite to each other; a frame that is disposed to surround at least part of the vibrator; and a holding unit that supports a boundary between the two portions and connects the vibrator to the frame. Moreover, a frequency adjustment film is disposed on a surface of the vibrator in an area between a connection portion of the holding unit connected to the vibrator and an end of the vibrator that faces the connection portion in a direction along the boundary between the two portions.
Claims20
A resonator comprising:
- a vibrator having two portions configured to vibrate in phases opposite to each other;
- a frame that surrounds at least part of the vibrator;
- a holding unit that supports a boundary between the two portions of the vibrator and that connects the vibrator to the frame;
- and
- a frequency adjustment film disposed on a surface of the vibrator in an area between a connection portion of the holding unit connected to the vibrator and an end of the vibrator that faces the connection portion in a direction along the boundary between the two portions.
A resonator comprising:
- a vibrator having two portions configured to vibrate in phases opposite to each other;
- and
- a frequency adjustment film disposed on a surface of the vibrator in an area closer to a boundary between the two portions of the vibrator than center portions of the two portions.
A resonator comprising:
- a vibrator having two portions configured to vibrate in phases opposite to each other;
- a frame that surrounds at least part of the vibrator;
- and
- a holding unit that connects the vibrator to the frame,
- wherein the vibrator includes:
- a piezoelectric film,
- a lower electrode disposed on a first side of the piezoelectric film,
- two upper electrodes disposed on a second side of the piezoelectric film and that face the lower electrode with the piezoelectric film interposed therebetween,
- a protective film that covers the two upper electrodes, and
- a frequency adjustment film that faces the lower electrode with the piezoelectric film and the protective film interposed therebetween, and
- wherein the frequency adjustment film is disposed in an area closer to opposing ends of the two upper electrodes than center portions of the two upper electrodes in a plan view of a surface of the vibrator.
Dependencies are inferred from the claim text.