Integrated Circuit Layouts with Fill Feature Shapes
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Cheng Yeh, Yen-Sen Wang, Ming-Yi Lin
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Cheng Yeh, Yen-Sen Wang, Ming-Yi Lin
Estimating the term…
Various examples of conductor features in integrated circuit layouts are disclosed herein. In an example, a method includes receiving an integrated circuit layout, inserting, into the integrated circuit layout, a design containing a first set of Front-End Of Line (FEOL) shapes of an integrated circuit and a first set of Back-End Of Line (BEOL) shapes of the integrated circuit, inserting, into the integrated circuit layout, a set of cells containing a second set of FEOL shapes of the integrated circuit and a second set of BEOL shapes of the integrated circuit, removing a subset of the second set of BEOL shapes that conflict with the design, and providing the integrated circuit layout that includes the design and the set of cells for fabrication of the integrated circuit. The second set of FEOL shapes includes contact shapes that define contacts of the integrated circuit.
A method comprising:
A method comprising:
A non-transitory machine-readable medium storing instructions that, when executed by a processing resource, cause the processing resource to:
Dependencies are inferred from the claim text.