US 2022/0276192 A1 · SENSOR

Abstract

According to one embodiment, a sensor includes a first sensor part. The first sensor part includes a first electrode, a first counter electrode, and a first intermediate layer located between the first electrode and the first counter electrode. The first counter electrode includes a first electrode side surface. The first electrode side surface crosses a first cross direction. The first cross direction crosses a first direction from the first electrode toward the first counter electrode. The first intermediate layer includes a first intermediate layer side surface. The first intermediate layer side surface crosses the first cross direction. The first intermediate layer side surface is recessed when referenced to the first electrode side surface.

Claims20

Dependent claims

A sensor, comprising:

a first sensor part,
the first sensor part including
a first electrode,
a first counter electrode, and
a first intermediate layer located between the first electrode and the first counter electrode,
the first counter electrode including a first electrode side surface,
the first electrode side surface crossing a first cross direction,
the first cross direction crossing a first direction from the first electrode toward the first counter electrode,
the first intermediate layer including a first intermediate layer side surface,
the first intermediate layer side surface crossing the first cross direction,
the first intermediate layer side surface being recessed when referenced to the first electrode side surface.

8 more elements

Dependencies are inferred from the claim text.

Sensor

Life of this patent

Sensor

Life of this patent

Abstract

Claims20