Measurement Method, Measurement Device, Measurement System, And Measurement Program

A measurement method, comprising:

• a low-pass filter processing step of performing low-pass filter processing on target data including a drift noise and a vibration component to generate vibration component reduction data in which the vibration component is reduced;
• a high-pass filter processing step of performing high-pass filter processing on the vibration component reduction data to generate drift noise reduction data in which the drift noise is reduced;
• an interval specifying step of calculating a first peak and a second peak of the drift noise reduction data and specifying a first interval before the first peak, a second interval between the first peak and the second peak, and a third interval after the second peak;
• a correction data estimation step of estimating, based on the drift noise reduction data, correction data in the second interval corresponding to a difference between the drift noise reduction data and data obtained by removing the drift noise from the vibration component reduction data;
• a vibration component data generation step of generating vibration component data, which includes the vibration component, by subtracting the vibration component reduction data from the target data;
• and
• a measurement data generation step of generating measurement data by setting data in the first interval as the vibration component reduction data, adding the drift noise reduction data, the correction data, and the vibration component data in the second interval, and setting data in the third interval as the vibration component reduction data, wherein
• the correction data estimation step includes:
• generating first interval inverted data by inverting a sign of the drift noise reduction data in the first interval,
• generating third interval inverted data by inverting a sign of the drift noise reduction data in the third interval,
• generating first line data linearly approximating the first interval inverted data smaller than a product of a first coefficient and a value obtained by inverting a sign of an amplitude of the first peak,
• generating second line data obtained by multiplying a line passing through the first peak and the second peak by a second coefficient,
• generating third line data linearly approximating the third interval inverted data smaller than a product of the first coefficient and a value obtained by inverting a sign of an amplitude of the second peak,
• calculating a first intersection point between the first line data and the second line data and a second intersection point between the second line data and the third line data, and
• generating the correction data in the second interval by using data before the first intersection point as the first line data, data from the first intersection point to the second intersection point as the second line data, and data after the second intersection point as the third line data.

A measurement device, comprising:

• a low-pass filter processing unit configured to perform low-pass filter processing on target data including a drift noise and a vibration component to generate vibration component reduction data in which the vibration component is reduced;
• a high-pass filter processing unit configured to perform high-pass filter processing on the vibration component reduction data to generate drift noise reduction data in which the drift noise is reduced;
• a correction data estimation unit configured to estimate, based on the drift noise reduction data, correction data corresponding to a difference between the drift noise reduction data and data obtained by removing the drift noise from the vibration component reduction data;
• a vibration component data generation unit configured to generate vibration component data, which includes the vibration component, by subtracting the vibration component reduction data from the target data;
• and
• a measurement data generation unit configured to generate measurement data by adding the drift noise reduction data, the correction data, and the vibration component data, wherein
• the correction data estimation unit is configured to:
• calculate a first peak and a second peak of the drift noise reduction data and specify a first interval before the first peak, a second interval between the first peak and the second peak, and a third interval after the second peak,
• generate first interval correction data by inverting a sign of the drift noise reduction data in the first interval,
• generate third interval correction data by inverting a sign of the drift noise reduction data in the third interval,
• generate first line data linearly approximating the first interval correction data smaller than a product of a first coefficient and a value obtained by inverting a sign of an amplitude of the first peak,
• generate second line data obtained by multiplying a line passing through the first peak and the second peak by a second coefficient,
• generate third line data linearly approximating the third interval correction data smaller than a product of the first coefficient and a value obtained by inverting a sign of an amplitude of the second peak,
• calculate a first intersection point between the first line data and the second line data and a second intersection point between the second line data and the third line data,
• generate the second interval correction data in the second interval by using data before the first intersection point as the first line data, data from the first intersection point to the second intersection point as the second line data, and data after the second intersection point as the third line data, and
• generate the correction data by adding the first interval correction data, the second interval correction data, and the third interval correction data.

A non-transitory computer-readable storage medium storing a measurement program, the measurement program causing a computer to execute:

• a low-pass filter processing step of performing low-pass filter processing on target data including a drift noise and a vibration component to generate vibration component reduction data in which the vibration component is reduced;
• a high-pass filter processing step of performing high-pass filter processing on the vibration component reduction data to generate drift noise reduction data in which the drift noise is reduced;
• a correction data estimation step of estimating, based on the drift noise reduction data, correction data corresponding to a difference between the drift noise reduction data and data obtained by removing the drift noise from the vibration component reduction data;
• a vibration component data generation step of generating vibration component data, which includes the vibration component, by subtracting the vibration component reduction data from the target data;
• and
• a measurement data generation step of generating measurement data by adding the drift noise reduction data, the correction data, and the vibration component data, wherein
• the correction data estimation step includes:
• an interval specifying step of calculating a first peak and a second peak of the drift noise reduction data and specifying a first interval before the first peak, a second interval between the first peak and the second peak, and a third interval after the second peak,
• a first interval correction data generation step of generating first interval correction data by inverting a sign of the drift noise reduction data in the first interval,
• a second interval correction data generation step of generating second interval correction data in the second interval,
• a third interval correction data generation step of generating third interval correction data by inverting a sign of the drift noise reduction data in the third interval, and
• a correction data generation step of generating the correction data by adding the first interval correction data, the second interval correction data, and the third interval correction data, and
• the second interval correction data generation step includes:
• generating first line data linearly approximating the first interval correction data smaller than a product of a first coefficient and a value obtained by inverting a sign of an amplitude of the first peak,
• generating second line data obtained by multiplying a line passing through the first peak and the second peak by a second coefficient,
• generating third line data linearly approximating the third interval correction data smaller than a product of the first coefficient and a value obtained by inverting a sign of an amplitude of the second peak,
• calculating a first intersection point between the first line data and the second line data and a second intersection point between the second line data and the third line data, and
• generating the second interval correction data in the second interval by using data before the first intersection point as the first line data, data from the first intersection point to the second intersection point as the second line data, and data after the second intersection point as the third line data.