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US 2022/0274223 A1Published application
Apparatus for grinding surface of substrate
AssigneeHaesung Ds Co., Ltd.
InventorsJong Hoe Ku, Sung Il Kang, I Gyun Kim, Hong Chan Kim, In Seob Bae, Jung Ho Heo
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Abstract
A substrate surface grinding apparatus includes: a grinding device including a plurality of grinding rollers configured to grind a surface of a substrate; and a substrate support member configured to support the substrate, wherein rotational axes of the grinding rollers are disposed to be inclined to rotational axes of adjacent grinding rollers.
Claims6
A substrate surface grinding apparatus comprising:
- a grinding device including a plurality of grinding rollers configured to grind a surface of a substrate;
- and
- a substrate support member configured to support the substrate,
- wherein rotational axes of the grinding rollers are disposed to be inclined to rotational axes of adjacent grinding rollers.
1 more element
Dependencies are inferred from the claim text.