Laser drilling apparatus

Abstract

This application relates to a laser drilling device. The device may include a variable focus module configured to vary a focal length of a laser beam. The device may also include an optical axis moving unit configured to, when an optical axis at a time point at which the laser beam passes through the variable focus module is incident is referred to as a reference optical axis, emit the laser beam by being moved by a predetermined distance with respect to the reference optical axis. The device may further include a first driving unit configured to rotate the optical axis moving unit, and a first focusing lens configured to focus the laser beam passing through the optical axis moving unit. A surface of a workpiece is drilled while rotating the optical axis moving unit by the first driving unit and gradually changing the focal length of the laser beam.

Dependencies are inferred from the claim text.