Cmut transducer
AssigneeVermon
InventorsDominique GROSS, Cyril MEYNIER, Nicolas SENEGOND
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Abstract
The present disclosure relates to a CMUT transducer (200) comprising: a substrate (101) coated with a dielectric layer (103); a cavity (105) formed in the dielectric layer (103); a conductive or semiconductor membrane (107) suspended above the cavity (105); and a dielectric coating (104) arranged on an upper surface of the substrate (101) at the bottom of the cavity or on a lower surface of the membrane at the top of the cavity and extending, in top view, on the most part of the surface of the cavity (105), wherein the dielectric coating (104) is structured opposite the cavity (105).
Claims13
A CMUT transducer comprising:
- a substrate coated with a dielectric layer;
- a cavity formed in the dielectric layer;
- a conductive or semiconductor membrane suspended above the cavity;
- and
- a dielectric coating arranged on an upper surface of the substrate at the bottom of the cavity or on a lower surface of the membrane at the top of the cavity and extending, in top view, on the most part of the surface of the cavity,
- wherein the dielectric coating is structured opposite the cavity.
Dependencies are inferred from the claim text.