Back to results
US 2022/0268655 A1Published application
Pressure measuring cell
AssigneeReseaTech GMBH
InventorsSimon ZUMBRUNNEN, Philipp HASLEBACHER, Jürg DE PIETRO
Life of this patent
Estimating the term…
Abstract
The invention relates to a pressure measuring cell with a base body including an internal space, which base body comprises a first opening. A pressure sensor is arranged in the internal space of the base body and the internal space is filled with a pressure transfer medium. The pressure measuring cell further comprises an uneven membrane made from plastic. The membrane fully covers the first opening of the base body and is metallically coated at least on one of its two sides.
Claims22
Pressure measuring cell comprising
- a base body comprising an internal space, said base body having a first opening,
- a pressure sensor arranged in the internal space of the base body,
- a pressure transfer medium arranged in the internal space of the base body, said pressure transfer medium being a liquid, a gel, an oil or a hardened elastomer,
- a plastic membrane attached in such a way to the base body that the first opening is fully covered,
- wherein the membrane comprises an uneven form, and wherein the membrane comprises a metallic coating on at least one side.
2 more elements
Method for fabrication of a pressure measuring cell, comprising the following steps:
- positioning of a preformed metal-coated or uncoated membrane at a base body comprising an internal space and a first opening, so that the membrane fully covers the first opening of the base body;
- laser welding the membrane along the perimeter of the first opening, respectively a suitable distance to the perimeter of the first opening, for hermetically attaching the membrane to the base body;
- optionally, if the membrane is uncoated, coating, preferably through sputtering, the side of the membrane facing the internal space with a metal alloy, preferably with a nickel alloy;
- filling the internal space of the base body with a pressure transfer medium;
- hermetically fixating a covering element to which a pressure sensor is attached to the base body, preferably under negative pressure or vacuum conditions, so that the pressure sensor extends into the internal space and so that the pressure transfer medium fully fills the internal space delimited by the covering element, the base body and the membrane.
2 more elements
Dependencies are inferred from the claim text.