Self-sensing and self-actuating valve for modulating process coolant flow

A valve comprising:

• a flow compartment having a first inlet and an outlet that support a default flow rate of a coolant from a return line between a processing chamber and a coolant source, the flow compartment also having a second inlet;
• a first compartment that is inline with the return line and that is to feed the coolant through the first inlet and the second inlet;
• a plunger having a tip at a distal end of the plunger, the tip to variably open and close the second inlet to vary a flow rate of the coolant from the default flow rate;
• a bias spring positioned on a proximal end of the plunger;
• and
• a shape memory alloy (SMA) spring positioned on the plunger between the bias spring and the tip, the SMA spring attached to the tip to variably withdraw the tip from the second inlet in response to a rise in temperature of the coolant above a threshold temperature value.

A valve comprising:

• a first inline compartment to attach to a first return line exiting a processing chamber;
• a second inline compartment to attach to a second return line entering a coolant source;
• a flow compartment attached between the first inline compartment and the second inline compartment and through which a coolant is to return to the coolant source;
• a first inlet orifice and a second inlet orifice positioned between the first inline compartment and the flow compartment;
• a plunger having a tip to variably open and close the second inlet orifice;
• and
• a shape memory alloy (SMA) spring positioned on the plunger and attached to the tip, the SMA spring to variably increase or decrease a flow rate of the coolant through the second inlet orifice according to a temperature of the coolant.