Device and method for manufacturing device
AssigneeMitsubishi Electric Corporation
InventorsJulio Cezar BRANDELERO, Jeffrey EWANCHUK, Stefan MOLLOV
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Abstract
A device comprising a gate pad, a source pad and a passive actuator arranged to form a reversible mechanical and electrical connection between the gate pad and the source pad only if the temperature in the passive actuator exceeds a threshold value.
Claims14
A device comprising a gate pad, a source pad and a passive actuator, characterized in that the passive actuator is arranged to form a reversible mechanical and electrical connection between the gate pad and the source pad only if the temperature in the passive actuator exceeds a threshold value and the device further comprises a heater to maintain the passive actuator temperature above the threshold value under application of an actuator voltage above a predetermined level.
(canceled)
Method for manufacturing a device comprising a gate pad, a source pad and a passive actuator arranged to form a reversible mechanical and electrical connection between the gate pad and the source pad only if the temperature in the passive actuator exceeds a threshold value, the device further comprising a heater to maintain the passive actuator temperature above the threshold value under application of an actuator voltage above a predetermined level, the method comprising:
- providing a device comprising a transistor region;
- implanting a sacrificial oxide on part of a surface of the transistor region;
- metallizing the surface of the transistor region comprising the implanted sacrificial oxide to form the gate pad, the source pad and the passive actuator, the passive actuator extending over at least part of the sacrificial oxide;
- and
- removing the sacrificial oxide.
Dependencies are inferred from the claim text.