Method for producing microstructures in a glass substrate

2:

• The method according to claim 1, wherein the second outer surface is removed by etching in such a way that the cover layer of the first outer surface projects from a remaining plane of the second outer surface.

3:

• The method according to claim 1, wherein the cover layer is applied from an electrically-conductive material composition.

4:

• The method according to claim 1, further comprising applying a cover layer to the second outer surface.

5:

• The method according to claim 1, further comprising applying a cover layer to the second outer surface after the recesses in the second outer surface have reached the cover layer of the first outer surface as a result of progressive material removal.

6:

• The method according to claim 1, wherein a cone angle of the recesses is adjusted by the cover layer of the first outer surface and/or by laser parameters.

7:

• The method according to claim 1, wherein the cover layer is applied to the first outer surface and/or a cover layer is applied to the second outer surface only in at least one subregion of the glass substrate.

8:

• The method according to claim 1, wherein the modifications are introduced into the a least one volume between the two outer surfaces from one side by a plurality of laser beams connecting the two outer surfaces.

9:

• The method according to claim 1, wherein the modifications are introduced by the laser beam with a beam axis perpendicular to the a respective one of the outer surfaces of the glass substrate facing the laser beam.

10:

• The method according to claim 1, wherein the cover layer is reinforced with an additional functional layer.

11:

• The method according to claim 1, wherein a focus of the laser beam relative to the glass substrate does not change while the modifications are introduced.

12:

• The method according to claim 1, wherein the modifications are produced by a group of individual pulses, and wherein a focus of the laser beam relative to the glass substrate does not change for a duration of the group of individual pulses.

13:

• The method according to claim 12, wherein the individual pulses of a same group of the individual pulses are introduced into the glass substrate at a time interval of less than 1 μs.

14:

• The method according to claim 12, wherein a time interval between two successive groups of individual pulses is greater than a time interval between the individual pulses within one of the groups of individual pulses.