Spiraling polyphase electrodes for electrostatic chuck
AssigneeEntegris, Inc.
InventorsChun Wang CHAN, Jakub RYBCZYNSKI, Yan LIU
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Abstract
Electrostatic chucks include multiple electrodes, each having a spiral shape surrounding a center of a surface of the electrostatic chuck, to provide a polyphase electrostatic chuck. Each electrode can be connected to a different phase of power. The spiral shapes can each avoid one another as well as avoiding holes or openings in the surface of the electrostatic chuck. The spiral shapes can be algorithmically determined using a processor. These electrostatic chucks can include three or more electrodes. Methods of manufacture of the electrostatic chucks include determining shapes for each of the electrodes and providing each of the electrodes.
Claims19
An electrostatic chuck, comprising a plurality of electrodes formed on a surface in a spiral pattern, wherein each of the plurality of electrodes is interdigitated and each of the plurality of electrodes surrounds a center of the surface.
A method of manufacturing an electrostatic chuck, comprising:
- determining a pattern by which a plurality of electrodes can be provided on a surface, interdigitated with one another, such that each electrode extends from a starting point to an end point, each electrode surrounding a center of the surface, and
- providing the plurality of electrodes on the surface according to the pattern.
Dependencies are inferred from the claim text.