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US 2022/0187700 A1Published application
Deposition mask and deposition apparatus including the same
AssigneeSamsung Display Co., Ltd.
InventorsSeo Yeon Kim, Yoonseo Lee, Sanghoon Kim, Jongsung Park
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Abstract
A deposition mask includes a body portion, a pattern portion that penetrates the body portion and is configured to allow deposition material to pass through the body portion, a blocking portion disposed on the body portion, and a support portion disposed on the body portion adjacent to the blocking portion. The blocking portion contacts a display substrate, blocks the deposition material, and defines the pattern portion. The support portion contacts the display substrate.
Claims20
A deposition mask, comprising:
- a body portion;
- a pattern portion that penetrates the body portion and is configured to allow deposition material to pass through the body portion;
- a blocking portion disposed on the body portion, wherein the blocking portion contacts a display substrate, blocks the deposition material, and defines the pattern portion;
- and
- a support portion disposed on the body portion and adjacent to the blocking portion, wherein the support portion contacts the display substrate.
2 more elements
A deposition mask, comprising:
- a body portion;
- a plurality of pattern portions that penetrate the body portion and are configured to allow a deposition material to pass through the body portion;
- a plurality of blocking portions disposed on the body portion, wherein each of the plurality of blocking portions contacts a display substrate, blocks the deposition material, and defines the pattern portions;
- and
- a plurality of support portions disposed on the body portion, wherein each of the plurality of support portions contacts the display substrate and is disposed between adjacent blocking portions of the plurality of blocking portions.
2 more elements
A deposition apparatus, comprising:
- a chamber;
- a deposition mask disposed in the chamber;
- and
- a deposition source that faces the deposition mask, wherein the deposition source is configured to deposit a deposition material on a display substrate by spraying the deposition material to the deposition mask, wherein the display substrate includes a display area and a circuit area adjacent to the display area,
- wherein the deposition mask includes:
- a body portion;
- a pattern portion that overlaps the display area and penetrates the body portion, wherein the pattern portion is configured to pass the deposition material;
- a blocking portion disposed on the body portion, wherein the blocking portion contacts the display substrate in the circuit area;
- and
- a support portion disposed on the body portion and adjacent to the blocking portion, wherein the support portion contacts the display substrate.
7 more elements
Dependencies are inferred from the claim text.