Evaporation source

Abstract

An evaporation source includes a crucible, a heater, a heat adjusting assembly for convecting heat radiation between the heat adjusting assembly and the crucible body and including a first reflection plate and a second reflection plate, and a hollowed-out pattern provided in the second reflection plate. The crucible includes a crucible body having a top surface, a bottom surface and side surfaces connecting the top and the bottom surfaces; and a nozzle disposed on the top surface of the crucible body. The heater is disposed outside the crucible body for generating heat radiation. Wherein the first reflection is disposed on at least one side of the side surfaces of the crucible body, a gap exists between the first reflection plate and the crucible body; the second reflection plate is disposed under the bottom surface of the crucible body, a gap exists between the second reflection plate and the crucible body.

Dependencies are inferred from the claim text.