US 2022/0177302 A1 · MEMBRANE-BASED NANO-ELECTROMECHANICAL SYSTEMS DEVICE AND METHODS TO MAKE AND USE SAME

Abstract

Nano-electromechanical systems (NEMS) sensor devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The NEMS devices can have a trough shape (such as a serpentine shape arrangement) of the electrically conductive membrane. The thin, electrically conductive membrane has membrane-structures disposed upon it in an array of cavities. These membrane structures are between the thin, electrically conductive membrane and the main membrane trace. Such an arrangement increases the sensitivity of the NEMS sensor device. The electrically conductive membrane can be controllably wicked down on the edge of the oxide cavity to increase the sensitivity of the NEMS sensor device. Such NEMS sensor devices include NEMS sensor devices that are well suited to applications that measure magnetic fields that, operate below 10 kHz, such as brain-computer interfaces.

Claims38

Dependent claims

A nano-electromechanical system sensor device comprises a section that is oriented along a first plane, wherein the section comprises

(a) a thin, electrically conductive membrane having a first end and a second end, wherein
(i) the thin, electrically conductive membrane has a membrane structure deposited on the thin, electrically conductive membrane;
(b) a substrate oriented parallel to the first plane, wherein
(i) the substrate comprises a cavity having a substrate metal trace on the substrate, and
(ii) the thin, electrically conductive membrane is parallel to the first plane, wherein the thin, electrically conductive membrane bounds the cavity;
(c) a first connector electrically connected to the first end of the thin, electrically conductive membrane;
and
(d) a second connector electrically connected to the second end of the thin, electrically conductive membrane, such that current is operable to flow through the thin, electrically conductive membrane between the first connector and the second connector causing the thin, electrically conductive membrane facing the cavity to deflect in a direction perpendicular to the first plane in the presence of a magnetic field.

5 more elements

Dependencies are inferred from the claim text.

Membrane-based nano-electromechanical systems device and methods to make and use same

Life of this patent

Membrane-based nano-electromechanical systems device and methods to make and use same

Life of this patent

Abstract

Claims38