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US 2022/0172923 A1Published application
X-Ray Detection Apparatus and Method
AssigneeJEOL Ltd.
InventorTakanori Murano
Life of this patent
Estimating the term…
Abstract
A mask member is provided at an entrance opening of a mirror unit. Of a first diffraction grating and a second diffraction grating, when the second diffraction grating is used, the mask member masks preceding mirrors. With this process, aberration caused by reflective X-ray is suppressed. When the first diffraction grating is used, the mask member does not function. Alternatively, the mask member and another mask member may be selectively used.
Claims9
An X-ray detection apparatus comprising:
- a mirror unit comprising a reflective surface which applies light collection on an X-ray from an observation point on a sample;
- a spectroscopic device that applies spectral dispersion on the X-ray from the mirror unit, to thereby generate a dispersed X-ray which is spatially spread;
- an X-ray detector that detects the dispersed X-ray;
- and
- a mask member that is provided between the observation point and the mirror unit, and that partially covers the reflective surface, to thereby limit a reflective X-ray which is reflected by the reflective surface and reaches the spectroscopic device.
2 more elements
A method of detecting an X-ray, the method comprising:
- applying, with a mirror unit, light collection on an X-ray from an observation point on a sample;
- applying, with a spectroscopic device, spectral dispersion on an X-ray from the mirror unit, to thereby generate a dispersed X-ray which is spatially spread;
- detecting the dispersed X-ray;
- and
- covering, with a mask member and at a location between the observation point and the mirror unit, a portion, of a reflective surface of the mirror unit, which causes an aberration, to thereby limit a reflective X-ray which is reflected by the reflective surface and reaches the spectroscopic device.
2 more elements
Dependencies are inferred from the claim text.