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US 2022/0145492 A1Published application
Ingot puller apparatus having a heat shield disposed below a side heater and methods for preparing an ingot with such apparatus
AssigneeGlobalWaters Co., Ltd.
InventorsSumeet S. Bhagavat, Parthiv Daggolu, Benjamin Michael Meyer, JaeWoo Ryu
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Abstract
Ingot puller apparatus having a heat shield disposed below a side heater and methods for preparing an ingot in such ingot puller apparatus are disclosed. In some embodiments, the side heater is relatively short. The side heater may be fully above a floor of the crucible when the crucible is in its lowest position in the ingot puller.
Claims20
An ingot puller apparatus for producing a silicon ingot comprising:
- a crucible for holding a melt of silicon, the crucible having a floor and a sidewall that extends from the floor;
- a growth chamber for pulling a silicon ingot from the melt along a pull axis;
- a lift mechanism for raising and lowering the crucible during crystal growth relative to the pull axis, the crucible moving axially between a lowest position in which a charge of silicon is melted to produce the silicon melt, a seed-dip position at which a seed crystal is initially contacted with the melt to pull the silicon ingot from the melt, and a terminal position in which the crucible has been depleted of melt;
- a side heater disposed radially outward to the crucible sidewall as the crucible travels from the lowest position to the terminal position;
- a bottom heater disposed below the crucible floor;
- and
- a heat shield disposed directly below the side heater.
4 more elements
(canceled)
Dependencies are inferred from the claim text.