Silicide passivation of niobium
AssigneeInternational Business Machines Corporation
InventorsMatthew W. Copel, James B. Hannon, Adam M. Pyzyna
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Abstract
A superconducting device which includes a substrate, multiple niobium leads formed on the substrate, a niobium silicide (NbSix) passivation layer formed on a surface of at least one of the multiple niobium leads, and an aluminum lead formed directly on at least a portion of the NbSix passivation layer such that an interface therebetween is substantially free of oxygen and oxidized material, where the multiple niobium leads and the aluminum lead are constructed to carry a supercurrent while in use.
Claims20
A superconducting device, comprising:
- a substrate;
- a plurality of niobium leads formed on said substrate;
- a niobium silicide (NbSix) passivation layer formed on a surface of at least one of said plurality of niobium leads, wherein x is in a range from 0.5 to 2;
- and
- an aluminum lead formed directly on at least a portion of said NbSix passivation layer such that an interface therebetween is substantially free of oxygen and oxidized material,
- wherein said plurality of niobium leads and said aluminum lead are constructed to carry a supercurrent while in use.
A method of producing a superconducting device, comprising:
- forming a plurality of niobium leads on a substrate;
- forming a niobium silicide (NbSix) passivation layer on a surface of at least one of said plurality of niobium leads, wherein x is in a range from 0.5 to 2;
- and
- forming an aluminum lead directly on at least a portion of said niobium silicide passivation layer such that an interface therebetween is substantially free of oxygen and oxidized material,
- wherein said plurality of niobium leads and said aluminum lead are constructed to carry a supercurrent while in use.
A quantum computing system, comprising:
- a refrigeration system;
- and
- a qubit chip comprising a plurality of qubits, said qubit chip comprising:
- a substrate;
- a plurality of niobium leads formed on said substrate;
- a niobium silicide (NbSix) passivation layer formed on a surface of at least one of said plurality of niobium leads, wherein x is in a range from 0.5 to 2;
- and
- an aluminum lead formed directly on at least a portion of said NbSix passivation layer such that an interface therebetween is substantially free of oxygen and oxidized material,
- wherein said plurality of niobium leads and said aluminum lead are constructed to carry a supercurrent while in use.
Dependencies are inferred from the claim text.