Method for manufacturing memory and same
AssigneeChangxin Memory Technologies, Inc.
InventorsEr-Xuan Ping, Zhen Zhou, Lingguo Zhang
Life of this patent
Estimating the term…
Loading patent…
AssigneeChangxin Memory Technologies, Inc.
InventorsEr-Xuan Ping, Zhen Zhou, Lingguo Zhang
Estimating the term…
A method for manufacturing a memory includes: providing a substrate and multiple discrete pseudo bit line contact layers, a plurality of active areas being provided in the substrate, and each bit line contact layer being electrically connected to the active areas; forming pseudo bit line structures at tops of the pseudo bit line contact layers; forming sacrificial layers that fill regions between the adjacent pseudo bit line structures and are located on side walls of the pseudo bit line structures and the pseudo bit line contact layers; after forming the sacrificial layers, removing the pseudo bit line structures to form through holes exposing the pseudo bit line contact layers; removing the pseudo bit line contact layers to form through holes in the substrate; and forming bit line contact layers that fill the through holes in the substrate and are electrically connected to the active areas.
A method for manufacturing a memory, comprising:
Dependencies are inferred from the claim text.