Method for manufacturing memory and same
AssigneeChangxin Memory Technologies, Inc.
InventorsEr-Xuan PING, Zhen ZHOU, Lingguo ZHANG
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AssigneeChangxin Memory Technologies, Inc.
InventorsEr-Xuan PING, Zhen ZHOU, Lingguo ZHANG
Estimating the term…
A method for manufacturing a memory includes the following operations. A substrate and a plurality of separate initial bit line contact structures are provided, in which a plurality of active regions are formed in the substrate, and each of the initial bit line contact structures is electrically connected with the active regions, and each of the initial bit line contact structures is partially located in the substrate. Pseudo-bit line structures on the tops of the initial bit line contact structures are formed. The initial bit line contact structures are etched to form bit line contact layers and gaps between the substrate and the side walls of the bit line contact layers. First dielectric layers are formed on the side walls of the pseudo-bit line structures, in which the first dielectric layers are also located right above the gaps.
A method for manufacturing a memory, comprising:
A memory, comprising:
Dependencies are inferred from the claim text.