Method for manufacturing memory and memory
AssigneeChangxin Memory Technologies, Inc.
InventorJingwen LU
Life of this patent
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AssigneeChangxin Memory Technologies, Inc.
InventorJingwen LU
Estimating the term…
A method for manufacturing a memory device includes: a substrate is provided, the substrate including active regions; Bit Lines (BLs) are formed over the substrate, the BLs covering part of the active regions; a supporting layer is formed over the substrate covering the BLs and the substrate, first middle holes penetrating through the supporting layer and extending to the active regions are formed on the supporting layer, and gaps are formed between the first middle holes and the BLs; first protective layers are formed in the first middle holes, and etching holes which communicate with the substrate are formed in the first protective layers; the substrate and the active regions exposed in the etching holes are etched along the etching holes to form contact grooves; guide wires electrically connecting the active regions are formed in the first middle holes, the etching holes and the contact groove.
A method for manufacturing a memory device, comprising:
A memory device, comprising:
Dependencies are inferred from the claim text.