Semiconductor device, semiconductor structure and manufacturing method therefor
AssigneeChangxin Memory Technologies, Inc.
InventorsZhengqing SUN, Xing JIN
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AssigneeChangxin Memory Technologies, Inc.
InventorsZhengqing SUN, Xing JIN
Estimating the term…
A semiconductor structure manufacturing method includes: providing a substrate; forming a first insulating layer covering the substrate, and patterning the first insulating layer to form a plurality of vias and a plurality of isolation structures that are alternatingly distributed; forming conductive contact plugs in the vias respectively, where the conductive contact plugs cover bottoms of the vias and each includes a first region and a second region adjacent to each other, and the conductive contact plugs located in the first regions cover outer walls of the isolation structures and extend along the outer walls to surfaces of the isolation structures distal from the substrate; and forming a passivation layer covering side walls and surfaces of the conductive contact plugs.
A manufacturing method for a semiconductor structure, comprising:
A semiconductor structure, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.