Back to results
US 2022/0093506 A1Published application
Semiconductor structure
AssigneeChangxin Memory Technologies, Inc.
InventorsPING-HENG WU, Jie LIU
Life of this patent
Estimating the term…
Abstract
A semiconductor structure includes: a substrate and a dielectric layer arranged on the substrate; a conductive plug, a first portion of the conductive plug being arranged in the substrate, and a second portion of the conductive plug being arranged in the dielectric layer; and a capacitor array, the capacitor array at least surrounding the second portion of the conductive plug.
Claims15
A semiconductor structure, comprising:
- a substrate and a dielectric layer arranged on the substrate;
- a conductive plug, a first portion of the conductive plug being arranged in the substrate, and a second portion of the conductive plug being arranged in the dielectric layer;
- and
- a capacitor array, the capacitor array at least surrounding the second portion of the conductive plug.
1 more element
Dependencies are inferred from the claim text.