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US 2022/0091183 A1Published application
Open architecture for wafer automatic testing system
OwnerChien Wen Changinventor
Life of this patent
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Abstract
An open architecture for a wafer automatic testing system of one embodiment includes a wafer auto prober including a lifter and a fixture frame; a pogo-pin interface module mounted on the fixture frame; and at least one instrument chassis mounted on the fixture frame and above the pogo-pin interface module. The at least one instrument chassis is electrically connected to the pogo-pin interface module.
Claims10
An open architecture for a wafer automatic testing system, comprising:
- a wafer auto prober including a lifter and a fixture frame;
- a pogo-pin interface module disposed on the fixture frame;
- and
- at least one instrument chassis disposed on the fixture frame and above the pogo-pin interface module, the at least one instrument chassis being electrically connected to the pogo-pin interface module.
1 more element
An open architecture for a wafer automatic testing system, comprising:
- a wafer auto prober including a lifter and a fixture frame;
- a support device including a space on a bottom and a support member above the space, the support device being disposed on the fixture frame;
- a pogo-pin interface module disposed in the space of the support device;
- and
- at least one instrument chassis disposed on a top of the support member, the at least one instrument chassis being electrically connected to the pogo-pin interface module.
2 more elements
Dependencies are inferred from the claim text.