Manufacturing of imprint mold-forming substrate
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHiroyuki Yamazaki, Daiyu Okafuji, Masaki Takeuchi
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Abstract
An imprint mold-forming substrate is manufactured by providing a starting imprint mold-forming substrate (1) having a patterned portion (2) and a non-patterned portion (5), providing a table (3) having a recess (4), bonding the substrate (1) to the table (3) such that the patterned portion (2) is received in the recess (4) of the table to define a space region (7) between the patterned portion (2) and the table (3) such that the patterned portion is not in direct contact with the table, and performing contour machining on the substrate (1) secured to the table (3).
Claims2
A method for manufacturing an imprint mold-forming substrate, comprising the steps of:
- providing a starting imprint mold-forming substrate having a patterned portion and a non-patterned portion,
- providing a table having a recess,
- bonding the starting substrate at its non-patterned portion to the table such that the patterned portion of the starting substrate is received in the recess of the table to define a space region between the patterned portion and the table such that the patterned portion is not in direct contact with the table, and
- performing contour machining on at least a portion of the starting substrate secured to the table.
Dependencies are inferred from the claim text.