Laser devices including beam position calibrator and method for irradiating laser by using the same

Abstract

Provided is a laser device. The laser device according to an embodiment comprises a laser source that provides a laser beam to a process object, a laser deflector that deflects the laser beam supplied from the laser source, an object lens that focuses scattered light of the laser beam that has been incident on the process object and then scattered, an image capture device that captures an image of the scattered light focused in the object lens, and a corrector that corrects a position of the laser beam by using the captured image.

Dependencies are inferred from the claim text.