Vacuum ultraviolet excimer lamp with an inner axially symmetric wire electrode

Abstract

A dielectric barrier VUV excimer lamp has an elongated dielectric tube for holding an excimer-forming gas, a first electrode disposed within the dielectric tube, and a second electrode arranged outside of the dielectric tube. The first electrode is a wire electrode disposed along a centre axis of the dielectric tube, axially symmetric with respect to the centre axis, and physically connected to each end of the dielectric tube. The dielectric barrier VUV excimer lamp is an AC dielectric barrier discharge VUV excimer lamp or the dielectric barrier VUV excimer lamp is a pulsed DC dielectric barrier discharge VUV excimer lamp. A photochemical system has the dielectric barrier VUV excimer lamp. An excimer lamp system has the dielectric barrier VUV excimer lamp, and also has a power supply to supply electric power to the first electrode and the second electrode.

Dependencies are inferred from the claim text.