Semiconductor device and fabrication method thereof

Abstract

A semiconductor device includes a barrier layer, a dielectric layer, a first protection layer, a first spacer, and a gate. The dielectric layer is disposed on the barrier layer. The first protection layer is disposed on the barrier layer, in which the first protection layer extends from a first sidewall of the dielectric layer to a top surface of the barrier layer. The first spacer is disposed on and received by the first protection layer, in which a top end of the first protection layer comprises a first curved surface between the first spacer and the dielectric layer. The gate is disposed on the barrier layer, the dielectric layer, and the first spacer. The gate extends from a top surface of the dielectric layer and at least along the first curved surface of the first protection layer to make contact with the top surface of the barrier layer.

Dependencies are inferred from the claim text.