Integrated circuit system with super junction transistor mechanism and method of manufacture thereof

Abstract

An integrated circuit system including: a split gate super junction cell includes: a highly doped substrate including a first polarity; an epitaxial layer including the first polarity grown on the highly doped substrate; a stripe gate trench formed in the epitaxial layer; a stripe gate poly layer formed in the stripe gate trench; a dot body implant, including a second polarity, implanted adjacent to the stripe gate trench opposite the stripe gate poly layer; and a conductive column, including the second polarity, implanted in the center of the dot body implant and extending into the epitaxial layer.

Dependencies are inferred from the claim text.