Semiconductor device

A semiconductor device comprising:

• a substrate with a cell region and a chip guard region, the chip guard region surrounding the cell region;
• a first chip guard extending over the chip guard region in a first direction;
• a second chip guard extending over the chip guard region in the first direction, the second chip guard being spaced apart from the first chip guard;
• and
• a third chip guard extending over the chip guard region in a second direction, the second direction intersecting the first direction,
• wherein the first chip guard includes a first long sidewall, extending in the first direction, and a first short sidewall, extending in the second direction,
• the second chip guard incudes a second long sidewall, extending in the first direction, and a second short sidewall, extending in the second direction, and
• the third chip guard includes a third long sidewall, extending in the second direction, and a third short sidewall, extending in the first direction, and
• wherein the first short sidewall faces the third long sidewall, and
• the third short sidewall faces the second long sidewall.

A semiconductor device comprising:

• a connection structure with connection conductors and a first guard pattern;
• a semiconductor structure with a stack structure, cell plugs penetrating the stack structure, and a second guard pattern;
• and
• guard pads connecting the first guard pattern and the second guard pattern by being disposed between the first guard pattern and the second guard pattern,
• wherein the first guard pattern and the second guard pattern extend in a first direction,
• wherein the guard pads are spaced apart from each other in the first direction, and
• wherein a distance at which the guard pads are spaced apart from each other in the first direction is shorter than a length of the first guard pattern in the first direction and a length of the second guard pattern in the first direction.